Commodity: Hydrogen Chloride Gas (Electronic Grade)
Appearance: Colourless and pungent smell gas
Molecular Formula:HCl
Application:In the production of large scale integrated circuit, be used in the gas phase method of polishing single item silicon wafer, epitaxial base corrosion.
Package & Storage: Exclusive use steel cylinder for HCl,resistant to corrosion,stainless steel. seamless steel gas cylinder, and its inside is polished finish. Cylinder valve is a resistant to corrosion and stainless steel of diaphragm valve.
Stored in a cool, well-ventilated place, away from fire, heat source, to prevent direct sunlight; not with bases, metal powders, flammable or combustible materials being stored and transported, non-leak.
Safety Protection: Operators should wear chemical gloves,gas masks and safety goggles.
Specification
| Inspection Items | Units |
Standards |
|
Appearance |
|
Colourless and Pungent Smell Gas |
|
Purity |
% |
≥99.999 |
|
Impurity Content |
Nitrogen |
ppm(V) |
≤2 |
Oxygen+ Hydrogen |
ppm(V) |
≤1 |
|
Hydrocarbon |
ppm(V) |
≤1 |
|
Carbon Monoxide |
ppm(V) |
≤2 |
|
Carbon Dioxide |
ppm(V) |
≤2 |
|
Water |
ppm(V) |
≤1 |
|
Metal Ion |
Iron(Fe) |
ppm(V) |
≤0.5 |
Nickel (Ni) |
ppm(V) |
≤0.1 |
|
Copper (Cu) |
ppm(V) |
≤0.1 |
|
Cobalt (Co) |
ppm(V) |
≤0.1 |
|
Manganese (Mn) |
ppm(V) |
≤0.1 |
|
Chromium(Cr) |
ppm(V) |
≤0.1 |
|
Dew Point/℃ |
<-76 |
||