Carbon Tetrafluoride/CF4/cas no 75-73-0
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| Post Date: | Apr 10,2017 |
| Expiry Date: | Oct 07,2017 |
| Detailed Description: |
Cas No. :75-73-0
Quantity: 20Metric Tons Specs:99.999% Price:80 USD Kilograms Payment Method: t/t Carbon Tetrafluoride (CF4) Product Name: Carbon Tetrafluoride Synonyms: Halocarbon 14, CF4, tetrafluoromethane Physical Characteristic M.F: Molecular Weight Specific Gravity(Air=1) Melting Point Boiling point Liquid Density CF4 88 3.04 -206.8oC -129oC (-130oC) 1.613g/cm3 Critical temperature Critical pressure Critical Density -45.67oC 3.73MPa 7.1 dm3/mol Colorless, nonflammable, high-pressure gas. Applications With added oxygen, CF4 (usually >80% mixture concentration) is used for plasma etching of polysilicon, silicon dioxide, silicon nitride, refractory metals and metal silicides. Etching and stripping of photoresists and other polymers are also major uses of CF4 (usually <20%) and oxygen mixtures. Specifications Items Unit Grade CF4 %vol min 99.999 99.995 99.99 O2 ppmv max 1 5 10 N2 ppmv max 4 20 40 CO ppmv max 0.3 0.5 1 CO2 ppmv max 1 5 10 SF6 ppmv max 1 1 5 H2O ppmv max 1 5 10 HF ppmw max 0.1 0.3 0.3 TFC(C2F6/CH2F2/CHF3/C3F8) ppmv max 1 10 30 Package Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L Valve CGA 580 Brass/ 590 Brass/ 320 Brass /DISS716 This is common cylinders sizes.RUIHUA fills customer owned cylinders. Shipping Information DOT Label Green, Nonflammable Gas DOT Class 2.2 CAS No.: 75-73-0 UN Number 1982 |
| CAS Registry Number: | 75-73-0 |
| Synonyms: | ;Tetrafluoromethane; |
| Molecular Formula: | CF4 |
| Molecular Weight: | 88 |
| Molecular Structure: | 
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| Safety Description: | S38:; |
| Company: | Zibo Eyuan Import and Export Co Ltd [ China ] |
| Contact: | Kevin Cui |
| Tel: | +86-533-6288980 |
| Fax: | +86-533-5207817 |
| Email: | cui@eyuantrading.com |
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